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A further objective of the present invention is to provide for a lithography apparatus that provides control of the polishing rate to control the rate at which surface material is removed from the surface of the substrate being polished.
A further objective of the present invention is to provide for a method of forming a chemical mechanical polishing slurry that exhibits decreased or eliminated polymerization of the components in the slurry.
In accordance with the objectives of the present invention, a new slurry that reduces the formation of scratches on a surface of a substrate by chemical mechanical polishing is provided. The slurry of the present invention includes a clear solution including an oxidizing agent, an abrasive, a first polymer having a carboxylic acid functional group, and a second polymer having an amide functional group. The slurry preferably includes a polishing rate control additive that controls the polishing rate of the substrate by producing hydroxide. The slurries of the present invention includes low levels of ions in the slurry that cause a decrease in the rate of slip between the substrate and the slurry.
The invention described in this application enables the formation of an effective chemical mechanical polishing slurry that is free of polymerization of the components in the slurry. This invention improves the polishing performance of the CMP apparatus. The present invention is particularly useful for the polishing of oxide layers in integrated circuit processing. In the description that follows, reference is made to the drawings.Simultaneous lute
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Local businesses are the backbone of any local economy. A thriving market of local businesses enable a city to prosper. They help create jobs and enable small businesses to thrive. Without local businesses, we would be less likely to have the local merchants and small businesses that help make our communities great places to live.
The information contained in this guide is focused on simple ways to find the best local businesses in your area and how to get what you want at the best prices. You will save time and money while using this guide.
Outfitter Information Resources
Throughout this guide we point out our favorite small outfitter businesses in each state. These small outfitter businesses are the ones that have a large selection of the products you want but also are able to offer them at reasonable prices.
Here are some of the online tools to use when researching local outfitter businesses:
The National Retail Association has a list of links to the websites for retailers located in their state.
This page lists retailers in the Santa Cruz Mountain region, including: Brewster, Summit and Santa Cruz. As this list keeps growing, so do the opportunities for you to save money!
The National Association of Ski Areas has a list of links to the websites of each ski area in the country.
As this list keeps growing, so do the opportunities for you to save money! Click this link if you live in a ski area and want to see a list of local retailers in your area.
What’s a good comparison shopping website?
You can start by using the resources at the top of the page. These links will point you to good comparison shopping websites for various products.
Buying Guide: Small Outfitter Businesses
These articles will help you decide if buying from a small outfitter business is a good option for you.
How Do You Find the Best Outfitter Businesses?
It is possible to use all of the resources above to find the best local outfitter businesses. As you find more small outfitter businesses in your area, the opportunities will be endless. There are local businesses in every state and as you grow your resource list of local small businesses,
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